摘要 |
<p>PURPOSE:To provide a structure of a micro electric field emitting electron source and establish a method for manufacturing the electron source, with which it is possible to narrow the spacing between the gate and emitter as much as practicable and generate concentration of the electric: field on the emitter by sharpening the foremost part of the emitter. CONSTITUTION:A micro electric field emitting electron source is equipped with a comb-shaped emitter 12 which is formed on a base board 11 and whose projecting part 12a in an overhang form is sharpened, a gate 13 which is formed on the base board 11 and positioned confronting the emitter 12, and a collector 14.</p> |