| 摘要 |
PURPOSE:To start discharge at a relatively lower voltage by providing a narroow gap area, where a discharge gap length is less than an average discharge gap length, in part of the discharge space. CONSTITUTION:A discharge container 1 made of synthetic silica glass has an inside tube 2 as the second dielectric and an outside tube 3 as the first dielectric coaxially arrange into a hollow cylindrical shape. The light-transmissive first electrode 4 is provided on the outer face of the outside tube 3 for dielectric barrier discharge and the second electrode 5 also served as a light reflecting film is provided on the outer face of the inside tube 2 for dielectric barrier discharge. The electrodes 4, 5 are extended to a furrowed portion 20 provided on the first electrode to form a gatter room 6, to form a narrow gap area 21. Discharge gas to form excimer molecules with dielectric barrier discharge is filled in a discharge space. When a power supply 10 connected to the electrodes 4, 5 to apply high frequency voltage thereto, discharge is started at a lower voltage and vacuum ultraviolet ray is obtained. |
