| 摘要 |
<p>PURPOSE:To improve the throughput of the whole semiconductor-device manufacturing processes without deteriorating the workability of a production unit by leveling the number in processes of semiconductor wafers. CONSTITUTION:A specified inquiry is conducted from a keyboard 2a in a batch treatment process, a processing and decision sequence 1b forms a starting support table for the batch treatment process and a lot table in the process of interest, and displays the starting support table and the lot table on a display 2b for a display in the order of priority, and a processing lot is determined and input by an operator. The operator inquired the host computer of the number of a stepper from the keyboard 2a in a photolithographic process, the processing and decision sequence 1b makes a starting support table for the photolithographic process, a process in the minimum number in processes in a post section and the order of priority of a stepper in the process of interest capable of being started in the process of interest in processes are displayed on the display 2b for the display, and the operator determines and inputs the processes of the arrangement of the next production unit.</p> |
