| 摘要 |
PURPOSE:To efficiently detect defects in each layer and to prevent contamination around the defects due to correction of the defects by forming a different thin film after a color filter layer and a transparent protective film are formed, inspecting and correcting defects through the thin film, and then removing the thin film. CONSTITUTION:A thin film for inspection such as polyvinyl alcohol (PVA) is formed to 1-2mum thickness on a color filter layer 2, then the state of the substrate including the surface of the color filter layer 2 is optically inspected. Since the PVA thin film has different refractive index from that of the color filter layer 2, the surface state can be easily inspected, for example, by changing angles of reflected light from a fluorescent lamp. When the defect is to be eliminated by heating, the color filter layer 2 itself is not contaminated since the thin film for inspection is present. After the inspection and correction of defects are completed, the PVA thin film is removed. After the PVA thin film is removed, the surface is polished by the same as normal polishing for glass. After transparent protective films 3, 4 are formed, the surface state is inspected in the same way. |
