| 摘要 |
PURPOSE:To make it possible to fully remove projections around a portion to be processed when removing and processing a metal film by radiating energy beam by first radiating an energy beam to the portion to be processed of the metal film and then radiating a second energy beam having an energy density different from the previous beam. CONSTITUTION:A polymer thin film 10 is formed on a substrate 1, and a metal film 2 comprising A1 or the like is formed on the polymer thin film 10. XeC1 excimer laser beam 4 with the energy density of 0.10J/cm<2> is applied to this metal film 2. By radiating this laser beam 4, a modifying region 2c is formed in the, region to be radiated of the metal film 2. Next, XeCl excimer laser beam 5 having the energy density of 0.90J/cm<2> is applied to the inner region of this modifying region 2c. By the radiation of this laser beam 5, the metal film inside the modifying region 2c is removed, and a removed portion 2b is formed. No significant deformation is recognized in the adjacent region of this removed portion 2b. |
