| 摘要 |
<p>PURPOSE:To feed electric energy to a photoelectric conversion device, such as a micromachine, which requires the energy, without using electric wiring by a method wherein laminated coils, which are used for primary and secondary coils, are formed by laminating each coil of the coils in the form of separating the laminated coils from each other on independent substrates. CONSTITUTION:A photoelectric conversion element 4 and a primary coil 6 of a shell-type thin film laminated transformer 5 are formed on a primary side semiconductor substrate 2, while a secondary coil 8 of the shell-type transformer 5 and an integrated circuit 9, which is one kind of a drive component, are formed on a secondary side substrate 7. Magnetic material films 10 on both substrates 2 and 7 are made to closely adhere to each other, whereby a magnetic material core, which is used for the transformer 5, is completed and a magnetic coupling of the coil 6 with the coil 8 is obtained via the core. Thereby, an electric energy can be fed to a photoelectric conversion device, such as a micromachine, which requires the energy, without using electric wiring.</p> |
