| 摘要 |
PURPOSE:To provide a physical-quantity measuring apparatus, which can expand the measuring range of the physical quantities such as displacement and pressure. CONSTITUTION:Laser beams having different wavelengths from an optical fiber 6 are cast on a deforming diaphragm in a detector 100. The reflected lights from the diaphragm and a facing reference surface are returned to the optical fiber 6 again. The interval between the reference surface and the deforming diaphragm, that is, the pressure difference, is measured by an optical interference method. The deformed amount of the diaphragms is optically measured with the laser beams having the different wavelength. Therefore, the effect of the characteristic change of the optical fiber is not present, the measuring accuracy is high and the measurement of the physical quantities such as displacement and pressure in the broad range can be performed. |
