Miniature infrared absorption spectroscope for light molecular gases in environmental, medical and process monitoring applications

摘要

The IR spectroscope involves a sensor for the selective detection of low molecular weight gases, especially carbon dioxide, carbon monoxide, methane, ethylene, nitrous oxide and sulphur dioxide in environmental, medicinal and process monitoring applications by means of an integrated zone plate. The spectroscope includes an IR source (8) with an integrated zone plate (5), an absorption (2) or reference chamber (4), and an IR detector (3).