METHOD OF AND APPARATUS FOR MICROWAVE-PLASMA PRODUCTION

摘要

A microwave-plasma apparatus for producing a plasma substantially at or above atmospheric pressure comprises a vessel (4) for containing gas substantially at or above atmospheric pressure and a plasma (6) once initiated. Microwave radiation is radiated into the vessel for the initiation and sustaining of a plasma. The vessel (4) is shaped to confine the plasma (6) in a volume to prevent dissipation of the plasma (6) once initiated. The power level of the microwave energy is controlled to sustain the plasma once initiated.