Light conductor for lateral illumination of object in semiconductor chip mounting prepn.

摘要

The light conductor (6) is part of an inspection system. The conductor is provided with four walls (5) about an opening (11) which are designed as a linked surface mirror. Light reflected from an object under inspection (1) is led away from the opening of the light conductor. The inclination angle (alpha) of the walls is pref. selectable depending on the refractive index of the conductor material. The inclination angle alpha of the walls amounts to about 45 degrees. The effective light outlet surface of the walls, has at least the height of the object. At least one reflector (4) is arranged at the outer edge of the light conductor, which deflects the light of the light conductor to the opening.