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发明名称
Verfahren zur Reinigung integrierter Schaltkreise während die Herstellung
摘要
申请公布号
DE69206944(D1)
申请公布日期
1996.02.01
申请号
DE19926006944
申请日期
1992.10.08
申请人
AIR PRODUCTS AND CHEMICALS, INC., ALLENTOWN, PA., US
发明人
ROBERTS, DAVID ALLEN, CARLSBAD, CA 92009, US;IVANKOVITS, JOHN CHRISTOPHER, ALLENTOWN, PA 18102, US;BOHLING, DAVID ARTHUR, EMMAUS, PA 18049, US
分类号
C11D7/02;C11D7/08;C11D7/26;C11D11/00;C23G5/00;H01L21/304;H01L21/306;H01L21/3105;H05K3/26;(IPC1-7):C11D7/26
主分类号
C11D7/02
代理机构
代理人
主权项
地址
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