Kapazitiver Beschleunigungsmessaufnehmer sowie einen solchen verwendender Beschleunigungsmesser ohne Kraftkompensation

摘要

The sensor, which is miniaturisable, comprises an insulating substrate (10) carrying a first measurement electrode (24) and comprises a flexible measurement arm (18) made of a conducting or semi-conductor material, a first end part of which is solidly attached to the substrate (10) and the other end part of which constitutes a second electrode which faces the first. The first end part is fixed to the substrate by means of a beam (16) which has a flexural modulus at least ten times greater than that of the measurement arm (18) and which is substantially parallel to the measurement arm, and a foot (14) rigidly fixed to the substrate (10) and situated between the two ends of the measurement arm, the connections of the beam (16) with the measurement arm (18) and with the foot (14) being similar to morticing (flush fitting).