| 摘要 |
PURPOSE: To shorten a time required for the analysis of equivalence, without being biased by the shape or characteristic of a image structure for executing a picture processing in a real time. CONSTITUTION: Equivalence is generated by applying continuous identification numbers to a pixel group positioned in one line, and when the identification number already allocated to the pixel group is applied to a pixel group brought into contact through at least one pixel along a direction in which the line is extended with the same pixel group for the first time. The same equivalence is recognized, and equivalence is already analyzed when the equivalence is inputted to a list constituting the configuration of intermediate codes. An allocation table is directly formed of the intermediate codes in the final stage of a processing for forming the pixel groups in plural lines. This is used for the automatic inspection of the surface of a structure at the time of manufacture, such as a mask, LCD, printed circuit broad, and semiconductor wafer. |
