Measurement transducer for measurement of pressure, force or acceleration

摘要

The measuring elements (16,30) measure the deflection or the expansion of the ceramic substrate (15) in the diaphragm section (17). A carrier part (13) is provided for the mounting of the ceramic substrate (15). The measuring transducer is connected to the measurement place, and an electronic evaluation circuit (29) is arranged on the substrate. The ceramic substrate (15) is connected materially locked on one side with the carrier part (13). A second system is provided for the force type decoupling between the carrier part (13) and the connecting part (22).