Plasma-Bearbeitungsgerät und Verfahren zur Gastemperaturmessung,申请号DE19896025133-传众专利搜索

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发明名称	Plasma-Bearbeitungsgerät und Verfahren zur Gastemperaturmessung
摘要
申请公布号	DE68925133(D1)	申请公布日期	1996.02.01
申请号	DE19896025133	申请日期	1989.02.17
申请人	MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD., KADOMA, OSAKA, JP	发明人	ISHIRARA, SHIN-ICHIRO, TAKATSUKI-SHI, JP
分类号	C23F4/00;G01K11/20;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32;C23C16/50	主分类号	C23F4/00
代理机构		代理人
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