| 摘要 |
<p>A short circuit point is detected between wiring patterns (41) on an integrated circuit (14) which includes functional circuits (42) and wiring patterns. For this purpose, an apparatus includes a power supply unit (15) for applying a predetermined voltage between power supply wiring patterns of the integrated circuit (14) such that the functional circuits (42) are in a non-operating state. A current consumed between the power supply wiring patterns is continuously monitored. In this state, a laser beam is irradiated to a predetermined point on the integrated circuit (14) and a current change amount is detected in response to the irradiation of the laser beam. The detection operation is performed for all the predetermined points. A short circuit point is determined between the wiring patterns from data indicating the current change amounts at the predetermined points. <MATH></p> |
