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发明名称
Method and apparatus for silicon nitride precursor solids recovery
摘要
申请公布号
EP0517365(B1)
申请公布日期
1996.01.31
申请号
EP19920303931
申请日期
1992.04.30
申请人
FORD MOTOR COMPANY LIMITED;FORD FRANCE S. A.;FORD-WERKE AKTIENGESELLSCHAFT
发明人
CROSBIE, GARY M.;PREDMESKY, RONALD L.;NICHOLSON, JOHN M.
分类号
C01B21/068;B01F15/06;B01J10/00;B01J19/00;(IPC1-7):C01B21/068
主分类号
C01B21/068
代理机构
代理人
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