| 发明名称 |
Boron-containing organic group-V compounds useful for gas phase deposition of the group-V element on substrates |
| 摘要 |
PCT No. PCT/EP93/01241 Sec. 371 Date Jan. 28, 1994 Sec. 102(e) Date Jan. 28, 1994 PCT Filed May 19, 1993 PCT Pub. No. WO93/24675 PCT Pub. Date Dec. 9, 1993.The invention relates to the use of boron-containing organic group-V compounds for the deposition of the elements of the Vth main group on substrates by gas-phase deposition.
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| 申请公布号 |
US5487357(A) |
申请公布日期 |
1996.01.30 |
| 申请号 |
US19940190028 |
申请日期 |
1994.01.28 |
| 申请人 |
MERCK PATENT GESELLSCHAFT MIT BESCHRANKTER HAFTUNG |
发明人 |
POHL, LUDWIG;SCHUMANN, HERBERT;MARSCHALL, CHRISTIAN |
| 分类号 |
C07F5/02;C07F9/50;C07F9/6568;C07F9/72;C07F9/90;C07F9/92;C23C16/18;C23C16/30;(IPC1-7):C23C16/18;C23C16/38 |
主分类号 |
C07F5/02 |
| 代理机构 |
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