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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH0827572(A)
申请公布日期
1996.01.30
申请号
JP19940166709
申请日期
1994.07.19
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YASUI HIDEAKI;TANAKA HIROYOSHI
分类号
C23C14/35;C23C14/40;C23C14/44;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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