发明名称 |
Sputtering targets having life alarm function |
摘要 |
A sputtering target is provided in which a gas component source (material capable of evolving gas) is included in the bottom portion of the target. Predicting and determining the expiration of the useful life of sputtering targets is permitted more precisely and in a simpler way than heretofore described. Moreover over-sputtering is prevented with an improvement in target use efficiency.
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申请公布号 |
US5487823(A) |
申请公布日期 |
1996.01.30 |
申请号 |
US19940233171 |
申请日期 |
1994.04.26 |
申请人 |
JAPAN ENERGY CORPORATION;OKI ELECTRIC IND CO LTD |
发明人 |
SAWADA, SUSUMU;ANAN, JUNICHI;NAKAMURA, HIROKI;SAKAYA, YOSHIHIRO |
分类号 |
C23C14/34;H01J37/32;(IPC1-7):C23C14/34;C23C14/52 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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