发明名称 Method for pulling a silicon single crystal
摘要 A method for pulling a silicon single crystal has the single crystal being pulled at a speed defined as maximum pulling speed in the vertical direction with respect to a silicon melt held in a crucible. The value of the maximum pulling speed is approximately proportional to the axial temperature gradient in the growing single crystal.
申请公布号 US5487354(A) 申请公布日期 1996.01.30
申请号 US19940349397 申请日期 1994.12.05
申请人 WACKER-CHEMITRONIC GESELLSCHAFT FUER ELETRONIK-GRUNDSTOFFE MBH 发明人 VON AMMON, WILFRIED;DORNBERGER, ERICH;OELKRUG, HANS;GERLACH, PETER;SEGIETH, FRANZ
分类号 C30B15/22;C30B15/00;C30B29/06;H01L21/208;(IPC1-7):C30B15/10 主分类号 C30B15/22
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