发明名称 |
System and method for high-speed potentiometry using scanning probe microscope |
摘要 |
A potentiometry apparatus for measuring a periodic electrical waveform existing proximate the surface of a sample such as a semiconductor wafer is disclosed herein. The potentiometry apparatus includes a pulse generator for generating a sequence of electrical pulses at a pulse frequency offset from the frequency of the surface waveform by a mixing frequency. A cantilever coupled to the pulse generator serves to carry the electrical pulses to a position proximate the surface of the sample. In a capacitive displacement mode the cantilever is mechanically displaced so as to generate a time-expanded representation of the electrical surface waveform having a repetition frequency equal to the mixing frequency. During displacement mode operation an optical detection circuit may be employed to monitor deflection of the cantilever. In a tunneling current mode the cantilever is again employed to carry the electrical pulses to a position proximate the surface of the sample. In this mode a tunneling current propagating through the cantilever at the mixing frequency provides a time,expanded representation of the electrical surface waveform.
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申请公布号 |
US5488305(A) |
申请公布日期 |
1996.01.30 |
申请号 |
US19940313758 |
申请日期 |
1994.09.28 |
申请人 |
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY |
发明人 |
BLOOM, DAVID M.;HO, FRANCIS;HOU, ALFRED S. |
分类号 |
G01Q60/38;G01B5/28;G01B21/30;G01Q10/06;G01Q70/14;(IPC1-7):G01B5/28 |
主分类号 |
G01Q60/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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