| 摘要 |
PURPOSE:To provide a machining method for a nozzle, machining the nozzle with a large volume in a laser beam machining device by which machining can be performed with a large taper angle. CONSTITUTION:A prism 5 is provided in the optical path of an excimer laser beam 2, and the prism 5 is vibrated by the rotation of a pinion 8 connected to the rack of a fixing plate 7. And, a nozzle with a taper is machined by irradiating a nozzle plate 6 with the excimer laser beam 2 while making a pinion rotation angle small (the vibration width of the prism 5 small) to the elapse of a machining time. When printing by using a nozzle plate 6 whose nozzle with this taper is machined, on an inject head, a satisfactory injection can be performed, and a printing quality is made satisfactory without the intrusion of air into the nozzle. |
