发明名称 Method of depositing metal oxides
摘要 Metal oxide fine powders and thin films prepared by exchange reactions between organosemiconductor oxides (such as disiloxanes) and metal coordination compounds, metallic halides, or organometallic compounds in inert environments and anhydrous solvents.
申请公布号 US5487918(A) 申请公布日期 1996.01.30
申请号 US19920837216 申请日期 1992.02.18
申请人 AKHTAR, MASUD 发明人 AKHTAR, MASUD
分类号 C01B13/32;C01G5/00;C01G9/02;(IPC1-7):C23C16/40;B05D3/02 主分类号 C01B13/32
代理机构 代理人
主权项
地址