SEMICNDUCTOR SUBSTRATE AND ITS PRODUCTION,申请号JP19940192177-传众专利搜索

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发明名称	SEMICNDUCTOR SUBSTRATE AND ITS PRODUCTION
摘要
申请公布号	JPH0826891(A)	申请公布日期	1996.01.30
申请号	JP19940192177	申请日期	1994.07.21
申请人	SUMITOMO SITIX CORP	发明人	KII TAKESHI
分类号	C30B25/02;C30B29/06;H01L21/205;(IPC1-7):C30B29/06	主分类号	C30B25/02
代理机构		代理人
主权项
地址

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