| 摘要 |
<p>An apparatus for holding an optical pellicle made up of a pellicle frame and a pellicle membrane is provided. The apparatus includes a substantially rigid, planar member having a centrally disposed window for removably receiving an optical pellicle. The inner dimension of the window is only slightly greater than the outer dimension of the pellicle such that a frictioned fit between the planar member and the pellicle is achievable. The planar member includes an inwardly extending shoulder against which the pellicle can be seated. The shoulder extends inwardly no further than the thickness of the pellicle frame. The planar member also includes a biasing portion facing inwardly toward the window for yieldably holding the pellicle in place.</p> |
