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发明名称
摘要
申请公布号
JPH088231(B2)
申请公布日期
1996.01.29
申请号
JP19900265506
申请日期
1990.10.02
申请人
发明人
分类号
H01L21/302;H01L21/304;H01L21/306;(IPC1-7):H01L21/306
主分类号
H01L21/302
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代理人
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