发明名称 Vapour coating device for prodn. of thin filmed solar cells
摘要 The vapour coating device consists of a holding unit (2) for the material to be vaporised, surrounded by a rotatable cylindrical reflector body (6) with a slit-shaped opening (7). The body (6) is heated and can rotate around the unit (2) so that the opening can be in any required position.
申请公布号 DE4422697(C1) 申请公布日期 1996.01.25
申请号 DE19944422697 申请日期 1994.06.29
申请人 ZENTRUM FUER SONNENENERGIE- UND WASSERSTOFF-FORSCHUNG BADEN-WUERTTEMBERG, 70565 STUTTGART, DE 发明人 DIMMLER, BERNHARD, 72145 HIRRLINGEN, DE;SCHOCK, HANS-WERNER, DR., 70563 STUTTGART, DE
分类号 C23C14/24;H01L31/032;H01L31/18;(IPC1-7):C23C14/22;C23C14/56 主分类号 C23C14/24
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