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发明名称
摘要
申请公布号	JPH085745(B2)	申请公布日期	1996.01.24
申请号	JP19920253275	申请日期	1992.09.22
申请人		发明人
分类号	C30B15/10;C30B15/00;C30B27/02;C30B29/42;H01L21/208;(IPC1-7):C30B27/02	主分类号	C30B15/10
代理机构		代理人
主权项
地址

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