发明名称 Microvalve for fluid delivery system
摘要 <p>A fluid delivery force-actuated valve, such as a gas delivery pneumatic-actuated valve suitable for use in the electronic industry, employing bellows (14) means so that the actuation means can be used to open or close the valve independent of the force of the pressurized fluid. <MATH></p>
申请公布号 EP0693648(A1) 申请公布日期 1996.01.24
申请号 EP19950111199 申请日期 1995.07.17
申请人 PRAXAIR TECHNOLOGY, INC. 发明人 GREGOIRE, ROGER JOSEPH
分类号 F16K31/126;F16K39/02;F16K41/10;(IPC1-7):F16K39/02 主分类号 F16K31/126
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