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发明名称
WAFER TRANSPORT DEVICE
摘要
申请公布号
EP0693035(A1)
申请公布日期
1996.01.24
申请号
EP19940916045
申请日期
1994.05.06
申请人
MILLER, KENNETH C.
发明人
MILLER, KENNETH C.
分类号
B65G49/07;H01L21/677;(IPC1-7):B65G49/00;H01L21/00
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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