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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0823010(A)
申请公布日期
1996.01.23
申请号
JP19940175942
申请日期
1994.07.05
申请人
HITACHI LTD
发明人
KANEMITSU NOBUYA;NISHI KUNIHIKO;KOYAMA HIROSHI
分类号
H01L21/60;H01L23/28;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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