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发明名称
CONTROL METHOD OF SHAPE VARIABLE MIRROR AND COMPENSATION OPTICAL DEVICE
摘要
申请公布号
JPH0821964(A)
申请公布日期
1996.01.23
申请号
JP19940153299
申请日期
1994.07.05
申请人
HITACHI LTD
发明人
ICHINOSE YUJI
分类号
G02B26/00;G01J9/00;(IPC1-7):G02B26/00
主分类号
G02B26/00
代理机构
代理人
主权项
地址
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