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发明名称
VACUUM CHUCK FOR SUBSTRATE
摘要
申请公布号
JPH0819981(A)
申请公布日期
1996.01.23
申请号
JP19940176074
申请日期
1994.07.04
申请人
SONY CORP
发明人
TAKAHASHI SADAHISA;CHIBA YUKIYA
分类号
B25J15/06;B65H3/08;(IPC1-7):B25J15/06
主分类号
B25J15/06
代理机构
代理人
主权项
地址
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