| 摘要 |
PURPOSE:To effectively grind down only desired protruding parts without generating so-called 'dishing'. CONSTITUTION:Average distance, during grinding, between the surface of the recessed part of a film and the surface of a grinding cloth 22 is set wider than the average grain diameter of grinding grains 31, by adding organic compound wherein at least one hydrophilic group is included and molecular weight is larger than or equal to 100 to grinding liquid 32. The friction coefficient between the film to be ground and the grinding liquid 32 is set larger than that between the grinding cloth and the grinding liquid 32, during grinding. |
