| 摘要 |
<p>PURPOSE:To correctly detect a mark forming position regardless of the degradation of the detection condition of fluorescence from a mark. CONSTITUTION:A mark 16 is scanned while being intermittently irradiated with light 17, and light 18 emitted from the scan position is taken in and is converted to an electric signal by a photoelectric conversion means 12. The change of the input waveform is detected from the converted signal synchronously with irradiated light 17 to take out a detection value 19 corresponding to the fluorescent component, and a comparison value 20 increased or reduced in proportion to the change of incident light 18 is individually detected by an incidence intensity detection means 8, and the detection value 19 and the comparison value 20 are compared with each other by a mark discriminating means 14 in the period when significant signal input is confirmed by a signal input discriminating means 15, and the mark forming position is discriminated when the detection value 19 exceeds the comparison value 20.</p> |
