Method and a device for a highly accurate measurement of distances, which may change, if a necessary, between an object, for example a clamp workpiece, and a point of reference

摘要

A method and device is disclosed wherein a subject is excited by electromagnetic radiation in a locally limited range to emit radiation that is not coherent with the exciting radiation. The radiation of atoms lying close to one another on the surface of the subject is not correlated, i.e., the excited point of light radiates incoherently in space, and generally also in time. Since only this incoherent radiation emitted by the point of light is analyzed in distance determination, no speckle structure occurs in the point of light, which makes it possible more accurately to find the position of the point of light and thus also to find the distance much more accurately.