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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH0820867(A)
申请公布日期
1996.01.23
申请号
JP19940159783
申请日期
1994.07.12
申请人
SHIMADZU CORP
发明人
OZAKI JUNICHIRO
分类号
C23C14/34;H01J37/32;H01L21/203;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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