| 摘要 |
PURPOSE:To provide an automatic focusing device performing the autofocusing of a microscope at a high speed. CONSTITUTION:This device is provided with an image pickup device 16 having an image pickup surface whose setting angle is changed at two positions, that is, a vertical position where the surface is vertical to the optical axis of the microscope and an inclined position where it is inclined at a specified angle theta, an image processor 19 calculating a focusing position on the optical axis based on the received light distribution on the image pickup surface at the inclined position and a total control part 18 actuating a lens actuator 15 based on the calculated value. |
