| 摘要 |
<p>PURPOSE:To mount easily various types of reticles to prescribed positions on an aligner without depending upon the optical intensity transmissions of a light- shielding region and a light-transmitting region. CONSTITUTION:A method of mounting a reticle, which is provided with a light transmission measuring region 20 consisting of light-transmitting and light- shielding regions 21 and 22 and a reticle alignment mark 30, to a prescribed position on an aligner, which is provided with a reticle alignment mark detection system and a light transmission measuring system, is performed by a method wherein after the reticle is temporarily mounted to the aligner, the respective light transmissions of the regions 21 and 22 of the region 20 are measured by the light transmission measuring system, a light transmission thres-hold value is found on the basis of these measured light transmissions, the position of the mark 30 is detected by the reticle alignment mark detection system on the basis of this light transmission threshold value and the reticle is mounted to the prescribed position of the aligner.</p> |
