A test fixture for a boat having a plurality of slots for holding wafers includes a base for fixedly holding a boat to be tested; a wafer simulator, which wafer simulator includes a plurality of wafers sized to properly seat in the plurality of slots in the boat; structure for moving the plurality of wafers of the wafer simulator wholly into and out of the plurality of slots in the boat; and structure determining whether the plurality of wafers is properly seated in the plurality of slots in the boat when the wafer simulator is moved wholly into the plurality of slots in the boat.
申请公布号
US5485759(A)
申请公布日期
1996.01.23
申请号
US19940234395
申请日期
1994.04.28
申请人
ADVANCED MICRO DEVICES, INC.
发明人
GOFF, GERALD L.;SMITH, MICHAEL D.;CONBOY, MICHAEL R.