| 摘要 |
PURPOSE:To obtain the photosensitive compsn. having a high gamma-value and preventing the occurrence of a slightly soluble surface layer by incorporating an alkali-soluble resin, an optical acid generating agent, a compd. which is made alkali-soluble by an acid and an amine compd. or a nitrogen-contg. heterocyclic arom. compd. CONSTITUTION:This photosensitive compsn. contains an alkali-soluble resin, an optical acid generating agent and a compd. which is made alkali-soluble by the action of an acid generated by irradiation with light as principal components and further contains an amine compd. or a nitrogen-contg. heterocyclic arom. compd. It is desirabe that the amine compd. or the heterocyclic arom. compd. contained as an additive has >=140 deg.C b.p. under atmospheric pressure so as to prevent volatilization at the time of baking in a resist. image forming process. The amine compd. is, e.g. a compd. represented by formula I and the nitrogen-contg. heterocyclic arom. compd. is, e.g. a compd. represented by formula II. In the formulae I, II, each of R1-R3 and R4-R8 is H, alkyl, aryl, etc., arbitrary two of R1-R3 may bond to each other to form a 'ring and arbitrary two of R4-R8 may bond to each other to form a ring. |
