发明名称 |
Method and apparatus for measuring quantitative voltage contrast |
摘要 |
In a method and apparatus for measuring quantitative voltage contrast, an electron beam of the scanning electron microscope is located on a specimen electrode, and a grid voltage of an energy analyzer of the scanning electron microscope is varied. A detector detects secondary electron emission from the specimen electrode. A measured peak voltage of the specimen electrode is determined based on output from the detector. A specimen electrode voltage corrected for type I local field effect error is then obtained using the measured peak voltage and a type I calibration curve. The type I calibration curve represents peak voltage versus specimen electrode voltage. Type II local field effect error in the specimen electrode voltage is then corrected based on a type II calibration curve. The type II calibration curve represents a shift in specimen electrode peak voltage versus adjacent electrode voltage.
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申请公布号 |
US5486769(A) |
申请公布日期 |
1996.01.23 |
申请号 |
US19940290527 |
申请日期 |
1994.08.15 |
申请人 |
NATIONAL UNIVERSITY OF SINGAPORE |
发明人 |
CHIM, WAI K.;PHANG, JACOB C. H.;CHAN, DANIEL S. H. |
分类号 |
G01Q30/02;G01R31/305;(IPC1-7):G01R31/00 |
主分类号 |
G01Q30/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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