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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH0822989(A)
申请公布日期
1996.01.23
申请号
JP19940156887
申请日期
1994.07.08
申请人
SONY CORP
发明人
SASAKI MASAYOSHI
分类号
H01L21/28;H01L21/3205;H01L23/52;H01L29/78;(IPC1-7):H01L21/320
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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