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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH0822966(A)
申请公布日期
1996.01.23
申请号
JP19940153609
申请日期
1994.07.05
申请人
HITACHI LTD;HITACHI MICROCOMPUT SYST LTD;HITACHI VLSI ENG CORP
发明人
NISHIHARA SHINJI;SUZUKI MASAYASU;SAWARA MASASHI;ISHIDA SHINICHI;ABE HIROMI;HIRASAWA KEIJI;TSUGANE HIDEAKI
分类号
H01L21/28;H01L21/314;H01L21/768;H01L23/522;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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