发明名称 Etching a diamond body with a molten or partially molten metal
摘要 A diamond body, such as a CVD diamond film, is etched by immersion of the body in a molten or partially molten metal, such as the rare earth metal La or Ce. While the body is being etched, various portions of a major surface of the body can be protected for various time durations by masks against the etching-whereby, after dicing the body, the resulting dies can be used as submounts for lasers with feedback.
申请公布号 US5486263(A) 申请公布日期 1996.01.23
申请号 US19920908130 申请日期 1992.07.02
申请人 AT&T BELL LABORATORIES 发明人 DAUTREMONT-SMITH, WILLIAM C.;GRAEBNER, JOHN E.;JIN, SUNGHO;KATZ, AVISHAY
分类号 C30B29/04;C04B41/53;C04B41/91;C30B33/08;H01L21/24;H01L21/302;H01S5/00;(IPC1-7):H01L21/00 主分类号 C30B29/04
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