发明名称 |
Etching a diamond body with a molten or partially molten metal |
摘要 |
A diamond body, such as a CVD diamond film, is etched by immersion of the body in a molten or partially molten metal, such as the rare earth metal La or Ce. While the body is being etched, various portions of a major surface of the body can be protected for various time durations by masks against the etching-whereby, after dicing the body, the resulting dies can be used as submounts for lasers with feedback.
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申请公布号 |
US5486263(A) |
申请公布日期 |
1996.01.23 |
申请号 |
US19920908130 |
申请日期 |
1992.07.02 |
申请人 |
AT&T BELL LABORATORIES |
发明人 |
DAUTREMONT-SMITH, WILLIAM C.;GRAEBNER, JOHN E.;JIN, SUNGHO;KATZ, AVISHAY |
分类号 |
C30B29/04;C04B41/53;C04B41/91;C30B33/08;H01L21/24;H01L21/302;H01S5/00;(IPC1-7):H01L21/00 |
主分类号 |
C30B29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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