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发明名称
CATADIOPTRIC REDUCTION PROJECTION OPTICAL SYSTEM
摘要
申请公布号
JPH0821955(A)
申请公布日期
1996.01.23
申请号
JP19940155799
申请日期
1994.07.07
申请人
NIKON CORP
发明人
ISHIYAMA TOSHIRO
分类号
G02B13/14;G02B17/08;G03F7/20;(IPC1-7):G02B17/08
主分类号
G02B13/14
代理机构
代理人
主权项
地址
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