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发明名称
PRODUCTION OF THIN FILM PATTERN
摘要
申请公布号
JPH0818198(A)
申请公布日期
1996.01.19
申请号
JP19940170235
申请日期
1994.06.29
申请人
FUJI ELELCTROCHEM CO LTD
发明人
KAMIIZUMI HIROYA;SUZUKI NORIYUKI
分类号
G11B5/31;H05K3/02;(IPC1-7):H05K3/02
主分类号
G11B5/31
代理机构
代理人
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