SUBSTRATE TREATING DEVICE

摘要

PURPOSE:To reduce floor area for a substrate treating device installation and suppress an increase in the floor area of the substrate treating device due to a large substrate. CONSTITUTION:In a substrate treating device comprising: a centering treating part for performing a centering process for a substrate; a cleaning treating part 6 (or 7) for performing a cleaning process for the substrate treated by the centering treating part 5; a dry treating part 8 for performing a dry process for the substrate treated by the cleaning treating part 6; and a carry robot 9 for carrying the substrate to each treating part, one treating part is arranged in three dimensions on another treating part out of the centering treating part 5 and the dry treating part 8.