| 摘要 |
<p>PURPOSE:To provide a high-temperature strain gauge having a large bearing force to a centrifugal force with little influence to the flow of a fluid by successively vapour-depositing an insulation film, a thin film strain gauge, and a protective insulation film on a sheet metal plate whose surface has been mirror- polished so as to constitute a sheet-metal type strain gauge. CONSTITUTION:The surface of a sheet metal 1 made of SUS is mirror-polished so as to have a roughness of 0.02mum, and an insulation film 2 is formed on the surface of the sheet metal 1 by spatter-depositing a film of Al2O3 or SiO2 as much as 3mum. Further, on the surface of the film 2 a film of Ni-Cr is spatter- deposited so as to have a thicknee of approximately 0.2mum, and a strain gauge part 3 is formed by patterning this by means of etching. Thereafter, in the same way, after a film of Ni-Cu has been spatter-deposited as much as 0.2mum, an electrode taking-out part 4 is formed by the lift-off method, and further a film of Al2O3 or SiO2 is spatter-deposited as much as 0.7mum in such a condition that the taking-out part 4 of the gauge part 3 has been masked, so that an insulation film 5 as a protective film can be formed.</p> |
